Shared Equipment Catalogue - The University of Sheffield

Equipment Name:

Photolithography Mask Aligner

Manufacturer:

SUSS MicroTec

Model Number:

MJB4

Category:

Electrical & Electronic

Department:

Electronic and Electrical Engineering (EEE)

Shared Notes:

Class:

Process Equipment - Physical

Order:

Lithography

Genus:

Optical

Specialism:

For lithography process on semiconductor samples/wafers up to 4-inch diameter.

Contact Name:

Dr Kean Boon Lee

Contact Email:

Contact Telephone:

Website: