Shared Equipment Catalogue - The University of Sheffield

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Equipment Name:

Electron Beam Lithography Tool

Manufacturer:

Raith

Model Number:

-

Category:

Electrical & Electronic

Department:

Electronic and Electrical Engineering (EEE)

Shared Notes:

-

Class:

Process Equipment - Physical

Order:

Lithography

Genus:

Electron Beam

Specialism:

-

Contact Name:

Dr Paul Fry

Contact Email:

p.w.fry@sheffield.ac.uk

Contact Telephone:

-

Website:

https://www.raith.com/products/voyager.html